- Manufacturing basis on experience more than 14 years
- Customized solution to meet everyone’s special requirements
- Unique copper core of arc evaporation to obtain better conductivity
- Advanced design for arc evaporators for excellent work performance
- Box type and compact model is available to save the footprint
- Hybrid coating system is for your option
- Easy operation PLC control system
- High quality and famous brand vacuum pumps and accessories
- Overall structure: Vertical front door, horizontal front door, rear vacuum acquisition system
- • Materials: The cavity is made of high-quality SUS304 stainless steel
- • Ion arc source: Equipped with multiple sets of arc power supply according to the size of the equipment
- • Bias power supply: Equipped with high-power single-stage pulse bias power supply
- • Multi-arc targets: Multiple sets of titanium or stainless steel targets as standard
- • Rotating system: Variable frequency speed regulation, combination of revolution and rotation, upper transmission or lower transmission.
- • Vacuum system (Decorative coating equipment): Diffusion pump (optional molecular pump) + Roots pump + mechanical pumps
- • Gas control: Multi-way gas mass flow control system
- • Heating system: decorative coating 150 ℃ temperature control PID adjustable and controllable
- • Intelligent control: PLC intelligent control + HMI full-color touch interface, to achieve fully automatic logic control
- • Alarm and protection: Alarm under abnormal conditions and implement corresponding protection measures.
- Composition of the PVD machine:
- Vacuum chamber:
- Dual layers of vacuum chamber for insulating the heating produce by the arc deposition process. Well welded vacuum chamber without leakage basis on more than 10 years of manufacturing of vacuum equipment.
- Cathodes:
- Copper core arc cathodes for better conductivity for the arc deposition process. Droplet problem is minimized by the special design and power source which is particularly designed for arc deposition.
- Carousel:
- Carousel designed according to your substrates for a better deposition result.
- Pumping system
- High vacuum pumps for stable pumping ability and keep obtain the high vacuum efficiently. Both of molecular pump and diffusion pump is available for your option.
- Power sources
- We choose power sources from reliable manufacturers which ensure the precise power, current and voltage to obtain the high quality PVD coatings.
- PLC control system:
- Full touched panel with easy operation menu, English version is available.
- The common recipes can be recorded in the system and for fast option.
- Gas distribution system
- High precision gas flow controller to control the processing gas during PVD coating.