Model Number | ARC-1000 | ARC-1200 | ARC-1400 | ARC-1800 | ARC-2000 |
Dimension of vacuum chamber(diameter*height) | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 | 2000*2200 |
Material of vacuum chamber | SUS304 or SUS316L with cooling jacket | ||||
Quantity of arc sources | 8-12 sets | 10-14 sets | 12-16 sets | 14-24 sets | 18-36 sets |
Pumping system | molecular pump or diffusion pump+mechanical pump | molecular pump or diffusion pump+mechanical pumps, booster pump | |||
Pumping Time | From atmosphere to 5.0*10-2Pa less than 8 minutes | ||||
Bias Power Supply | 20kW | 30kW | 40kW | 60kW | 60kW |
Gas distribution System with Mass Flow Controllers | ≥2 sets | ||||
Vacuum Limit | 5.0*10-4 Pa | ||||
Working temperature | 100-250 centigrades | ||||
Working mode | Automatic or Manual mode, by 10.4 inches PLC touches screen | ||||
Total Power | 70-180kW | 70-180kW | 70-180kW | 120-300kW | 120-300kW |
Footprint | 3*3 meters | 3*3 meters | 3*4 meters | 4*5 meters | 4*5 meters |