Composition of the PVD machine:
- Vacuum chamber:
- Dual layers of vacuum chamber for insulating the heating produce by the arc deposition process. Well welded vacuum chamber without leakage basis on more than 10 years of manufacturing of vacuum equipment.
- Cathodes:
- Copper core arc cathodes for better conductivity for the arc deposition process. Droplet problem is minimized by the special design and power source which is particularly designed for arc deposition.
- Carousel:
- Carousel designed according to your substrates for a better deposition result.
- Pumping system
- High vacuum pumps for stable pumping ability and keep obtain the high vacuum efficiently. Both of molecular pump and diffusion pump is available for your option.
- Power sources
- We choose power sources from reliable manufacturers which ensure the precise power, current and voltage to obtain the high quality PVD coatings.
- PLC control system:
- Full touched panel with easy operation menu, English version is available.
- The common recipes can be recorded in the system and for fast option.
- Gas distribution system
- High precision gas flow controller to control the processing gas during PVD coating.