The structure is reasonable The film layer is uniform Film forming quality High pumping speed, short working cycle and high production efficiency Operation is convenient Low energy consumption and stable performance| Model Number | EV-1000 | EV-1200 | EV-1400 | EV-1800 | EV-2000 | Two doors or Two chambers model are available | |
| Dimension of vacuum chamber(diameter*height) | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 | 2000*2200 | ||
| Material of vacuum chamber | Carbon steel, SUS304 or SUS316L | ||||||
| Technology of working | vacuum resistance evaporation with tungsten& aluminum filaments, high power evaporation transformer | ||||||
| Pumping system | Diffusion pump+mechanical pumps, booster pump | ||||||
| Pumping Time | From atmosphere to 5.0*10-2Pa less than 8 minutes | ||||||
| Vacuum Limit | 5.0*10-4 Pa | ||||||
| Working temperature | Room temperature | ||||||
| Working mode | Automatic or Manual mode, by 10.4 inches PLC touches screen | ||||||
| Total Power | 40-80kW | 70-140kW | |||||
| Footprint | 2*2 meters | 2*3 meters | 3*3 meters | 3*3 meters | 3*4 meters | 4*5 meters | 5*6 meters |
| These units you can custom made | 1. Size of vacuum chamber 2. Configurations of pumps | ||||||
| Optional instruments | 1. Leakage detector 3. Arc ion deposition system 4. Magntron sputtering system | ||||||